Adaptive sliding-mode position control for piezo-actuated stage

Xinkai Chen, Takeshi Hisayama

Research output: Contribution to journalArticle

138 Citations (Scopus)

Abstract

The piezo-actuated stage is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezoactuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated stage, where the hysteresis is described by the Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither be identified nor be measured. The proposed control law ensures the global stability of the controlled piezo-actuated stage, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Pages (from-to)3927-3934
Number of pages8
JournalIEEE Transactions on Industrial Electronics
Volume55
Issue number11
DOIs
Publication statusPublished - 2008

Fingerprint

Piezoelectric actuators
Position control
Sliding mode control
Hysteresis
Electric fuses
Friction

Keywords

  • Adaptive sliding-mode control
  • Hysteresis
  • Piezo-actuated stage
  • Prandtl-Ishlinskii (PI) model

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Computer Science Applications

Cite this

Adaptive sliding-mode position control for piezo-actuated stage. / Chen, Xinkai; Hisayama, Takeshi.

In: IEEE Transactions on Industrial Electronics, Vol. 55, No. 11, 2008, p. 3927-3934.

Research output: Contribution to journalArticle

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