Advanced adaptive control for piezo-actuated nano-positioner

Xinkai Chen, Chun Yi Su, Toshio Fukuda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society
Pages3346-3351
Number of pages6
DOIs
Publication statusPublished - 2011 Dec 1
Event37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 - Melbourne, VIC, Australia
Duration: 2011 Nov 72011 Nov 10

Publication series

NameIECON Proceedings (Industrial Electronics Conference)

Conference

Conference37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011
CountryAustralia
CityMelbourne, VIC
Period11/11/711/11/10

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Chen, X., Su, C. Y., & Fukuda, T. (2011). Advanced adaptive control for piezo-actuated nano-positioner. In Proceedings: IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society (pp. 3346-3351). [6119849] (IECON Proceedings (Industrial Electronics Conference)). https://doi.org/10.1109/IECON.2011.6119849