Advanced adaptive control for piezo-actuated nano-positioner

Xinkai Chen, Chun Yi Su, Toshio Fukuda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationIECON Proceedings (Industrial Electronics Conference)
Pages3346-3351
Number of pages6
DOIs
Publication statusPublished - 2011
Event37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 - Melbourne, VIC
Duration: 2011 Nov 72011 Nov 10

Other

Other37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011
CityMelbourne, VIC
Period11/11/711/11/10

Fingerprint

Piezoelectric actuators
Hysteresis
Friction

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Chen, X., Su, C. Y., & Fukuda, T. (2011). Advanced adaptive control for piezo-actuated nano-positioner. In IECON Proceedings (Industrial Electronics Conference) (pp. 3346-3351). [6119849] https://doi.org/10.1109/IECON.2011.6119849

Advanced adaptive control for piezo-actuated nano-positioner. / Chen, Xinkai; Su, Chun Yi; Fukuda, Toshio.

IECON Proceedings (Industrial Electronics Conference). 2011. p. 3346-3351 6119849.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X, Su, CY & Fukuda, T 2011, Advanced adaptive control for piezo-actuated nano-positioner. in IECON Proceedings (Industrial Electronics Conference)., 6119849, pp. 3346-3351, 37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011, Melbourne, VIC, 11/11/7. https://doi.org/10.1109/IECON.2011.6119849
Chen X, Su CY, Fukuda T. Advanced adaptive control for piezo-actuated nano-positioner. In IECON Proceedings (Industrial Electronics Conference). 2011. p. 3346-3351. 6119849 https://doi.org/10.1109/IECON.2011.6119849
Chen, Xinkai ; Su, Chun Yi ; Fukuda, Toshio. / Advanced adaptive control for piezo-actuated nano-positioner. IECON Proceedings (Industrial Electronics Conference). 2011. pp. 3346-3351
@inproceedings{318ff79724454dd78f0c05ac8837b44b,
title = "Advanced adaptive control for piezo-actuated nano-positioner",
abstract = "The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.",
author = "Xinkai Chen and Su, {Chun Yi} and Toshio Fukuda",
year = "2011",
doi = "10.1109/IECON.2011.6119849",
language = "English",
isbn = "9781612849720",
pages = "3346--3351",
booktitle = "IECON Proceedings (Industrial Electronics Conference)",

}

TY - GEN

T1 - Advanced adaptive control for piezo-actuated nano-positioner

AU - Chen, Xinkai

AU - Su, Chun Yi

AU - Fukuda, Toshio

PY - 2011

Y1 - 2011

N2 - The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.

AB - The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.

UR - http://www.scopus.com/inward/record.url?scp=84863069624&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84863069624&partnerID=8YFLogxK

U2 - 10.1109/IECON.2011.6119849

DO - 10.1109/IECON.2011.6119849

M3 - Conference contribution

SN - 9781612849720

SP - 3346

EP - 3351

BT - IECON Proceedings (Industrial Electronics Conference)

ER -