Advanced control for nano-positioner driven by piezo actuator

Xinkai Chen, Chun Yi Su

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo- actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationProceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems
Pages126-131
Number of pages6
DOIs
Publication statusPublished - 2010
Event2010 6th International Conference on Computer Engineering and Systems, ICCES'2010 - Cairo
Duration: 2010 Nov 302010 Dec 1

Other

Other2010 6th International Conference on Computer Engineering and Systems, ICCES'2010
CityCairo
Period10/11/3010/12/1

Fingerprint

Actuators
Piezoelectric actuators
Hysteresis
Friction
Controllers

Keywords

  • Adaptive control
  • Hysteresis
  • Nano-positioner
  • Piezo actuator

ASJC Scopus subject areas

  • Computer Science (miscellaneous)
  • Hardware and Architecture

Cite this

Chen, X., & Su, C. Y. (2010). Advanced control for nano-positioner driven by piezo actuator. In Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems (pp. 126-131). [5674837] https://doi.org/10.1109/ICCES.2010.5674837

Advanced control for nano-positioner driven by piezo actuator. / Chen, Xinkai; Su, Chun Yi.

Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems. 2010. p. 126-131 5674837.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X & Su, CY 2010, Advanced control for nano-positioner driven by piezo actuator. in Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems., 5674837, pp. 126-131, 2010 6th International Conference on Computer Engineering and Systems, ICCES'2010, Cairo, 10/11/30. https://doi.org/10.1109/ICCES.2010.5674837
Chen X, Su CY. Advanced control for nano-positioner driven by piezo actuator. In Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems. 2010. p. 126-131. 5674837 https://doi.org/10.1109/ICCES.2010.5674837
Chen, Xinkai ; Su, Chun Yi. / Advanced control for nano-positioner driven by piezo actuator. Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems. 2010. pp. 126-131
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