@inproceedings{a35aefda569444fba56ff9d70de58c57,
title = "Advanced control for nano-positioner driven by piezo actuator",
abstract = "The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo- actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.",
keywords = "Adaptive control, Hysteresis, Nano-positioner, Piezo actuator",
author = "Xinkai Chen and Su, {Chun Yi}",
year = "2010",
month = dec,
day = "1",
doi = "10.1109/ICCES.2010.5674837",
language = "English",
isbn = "9781424470426",
series = "Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems",
pages = "126--131",
booktitle = "Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems",
note = "2010 6th International Conference on Computer Engineering and Systems, ICCES'2010 ; Conference date: 30-11-2010 Through 01-12-2010",
}