Advanced control for the XY-table driven by piezo-actuators

Xinkai Chen, Ying Feng, Chun Yi Su

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The XY table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY table is a challenging task. This paper discusses the high precision adaptive control for the XY talbe, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationIFAC Proceedings Volumes (IFAC-PapersOnline)
Pages5255-5260
Number of pages6
Volume18
EditionPART 1
DOIs
Publication statusPublished - 2011
Event18th IFAC World Congress - Milano
Duration: 2011 Aug 282011 Sep 2

Other

Other18th IFAC World Congress
CityMilano
Period11/8/2811/9/2

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ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Chen, X., Feng, Y., & Su, C. Y. (2011). Advanced control for the XY-table driven by piezo-actuators. In IFAC Proceedings Volumes (IFAC-PapersOnline) (PART 1 ed., Vol. 18, pp. 5255-5260) https://doi.org/10.3182/20110828-6-IT-1002.01750