TY - GEN
T1 - Advanced control for the XY-table driven by piezo-actuators
AU - Chen, Xinkai
AU - Feng, Ying
AU - Su, Chun Yi
N1 - Funding Information:
The work was partially supported by the Grants-in-Aid for Scientific Research of Japan Society for the Promotion of Science (JSPS) (No. 21560474), the National Fundamental Research Program of China under Grant 2009CB320601, the Funds for Natural Science Foundation of China under Grant 61020106003 and 61074097, the 111 Project under Grant B08015, and the Fundamental Research Funds for the Central Universities, SCUT under Grant 2009ZZ0005.
PY - 2011
Y1 - 2011
N2 - The XY table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY table is a challenging task. This paper discusses the high precision adaptive control for the XY talbe, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
AB - The XY table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY table is a challenging task. This paper discusses the high precision adaptive control for the XY talbe, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
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U2 - 10.3182/20110828-6-IT-1002.01750
DO - 10.3182/20110828-6-IT-1002.01750
M3 - Conference contribution
AN - SCOPUS:84866746761
SN - 9783902661937
T3 - IFAC Proceedings Volumes (IFAC-PapersOnline)
SP - 5255
EP - 5260
BT - Proceedings of the 18th IFAC World Congress
PB - IFAC Secretariat
ER -