Advanced control for the XY-table driven by piezo-actuators

Xinkai Chen, Ying Feng, Chun Yi Su

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The XY table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY table is a challenging task. This paper discusses the high precision adaptive control for the XY talbe, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationProceedings of the 18th IFAC World Congress
PublisherIFAC Secretariat
Pages5255-5260
Number of pages6
Edition1 PART 1
ISBN (Print)9783902661937
DOIs
Publication statusPublished - 2011 Jan 1

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
Number1 PART 1
Volume44
ISSN (Print)1474-6670

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Chen, X., Feng, Y., & Su, C. Y. (2011). Advanced control for the XY-table driven by piezo-actuators. In Proceedings of the 18th IFAC World Congress (1 PART 1 ed., pp. 5255-5260). (IFAC Proceedings Volumes (IFAC-PapersOnline); Vol. 44, No. 1 PART 1). IFAC Secretariat. https://doi.org/10.3182/20110828-6-IT-1002.01750