Advanced high precision control for XY-table

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationIntelligent Robotics and Applications - 5th International Conference, ICIRA 2012, Proceedings
Pages11-21
Number of pages11
EditionPART 1
DOIs
Publication statusPublished - 2012 Dec 1
Event5th International Conference on Intelligent Robotics and Applications, ICIRA 2012 - Montreal, QC, Canada
Duration: 2012 Oct 32012 Oct 5

Publication series

NameLecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
NumberPART 1
Volume7506 LNAI
ISSN (Print)0302-9743
ISSN (Electronic)1611-3349

Conference

Conference5th International Conference on Intelligent Robotics and Applications, ICIRA 2012
CountryCanada
CityMontreal, QC
Period12/10/312/10/5

Keywords

  • Adaptive control
  • Hysteresis
  • Piezo electric actuators
  • XY-table

ASJC Scopus subject areas

  • Theoretical Computer Science
  • Computer Science(all)

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  • Cite this

    Chen, X. (2012). Advanced high precision control for XY-table. In Intelligent Robotics and Applications - 5th International Conference, ICIRA 2012, Proceedings (PART 1 ed., pp. 11-21). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 7506 LNAI, No. PART 1). https://doi.org/10.1007/978-3-642-33509-9_2