Advanced high precision control for XY-table

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationLecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
Pages11-21
Number of pages11
Volume7506 LNAI
EditionPART 1
DOIs
Publication statusPublished - 2012
Event5th International Conference on Intelligent Robotics and Applications, ICIRA 2012 - Montreal, QC
Duration: 2012 Oct 32012 Oct 5

Publication series

NameLecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
NumberPART 1
Volume7506 LNAI
ISSN (Print)03029743
ISSN (Electronic)16113349

Other

Other5th International Conference on Intelligent Robotics and Applications, ICIRA 2012
CityMontreal, QC
Period12/10/312/10/5

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Keywords

  • Adaptive control
  • Hysteresis
  • Piezo electric actuators
  • XY-table

ASJC Scopus subject areas

  • Computer Science(all)
  • Theoretical Computer Science

Cite this

Chen, X. (2012). Advanced high precision control for XY-table. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (PART 1 ed., Vol. 7506 LNAI, pp. 11-21). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 7506 LNAI, No. PART 1). https://doi.org/10.1007/978-3-642-33509-9_2