Advanced Metallization for ULSI Applications

Osamu Nakatsuka, Hoo Jeong Lee, Young Bae Park, Kazuyoshi Ueno, Shinji Yokogawa

Research output: Contribution to journalEditorial

Original languageEnglish
Article number06J001
JournalJapanese Journal of Applied Physics
Volume55
Issue number63
DOIs
Publication statusPublished - 2016 Jan 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Nakatsuka, O., Lee, H. J., Park, Y. B., Ueno, K., & Yokogawa, S. (2016). Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 55(63), [06J001]. https://doi.org/10.7567/JJAP.55.06J001