An Outlier Removal Method for SPC in Semiconductor Manufactureing

Tomoaki Kubo, Masateru Minami, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)292-298
JournalSICE Journal of Control and Measurement System Integration
Volume3
Publication statusPublished - 2010 Oct 5

Cite this

An Outlier Removal Method for SPC in Semiconductor Manufactureing. / Kubo, Tomoaki; Minami, Masateru; Homma, Tetsuya.

In: SICE Journal of Control and Measurement System Integration, Vol. 3, 05.10.2010, p. 292-298.

Research output: Contribution to journalArticle

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AU - Minami, Masateru

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JO - SICE Journal of Control and Measurement System Integration

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