An Outlier Removal Method for SPC in Semiconductor Manufactureing

Tomoaki Kubo, Masateru Minami, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)292-298
JournalSICE Journal of Control and Measurement System Integration
Volume3
Publication statusPublished - 2010 Oct 5

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