Anisotropic etching of dielectrics exposed by high intensity femtosecond pulses

Saulius Juodkazis, Yuusuke Tabuchi, Takahiro Ebisui, Shigeki Matsuo, Hiroaki Misawa

Research output: Contribution to journal › Conference article › peer-review

9 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Anisotropic etching of dielectrics exposed by high intensity femtosecond pulses'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds