Application of bessel beams for microfabrication of dielectrics by femtosecond laser

Andrius Marcinkevicius; Saulius Juodkazis; Shigeki Matsuo; Vygantas Mizeikis; Hiroaki Misawa

doi:10.1143/jjap.40.l1197

Application of bessel beams for microfabrication of dielectrics by femtosecond laser

Andrius Marcinkevicius, Saulius Juodkazis, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

Research output: Contribution to journal › Letter › peer-review

81 Citations (Scopus)

Abstract

We demonstrate a novel approach to femtosecond microfabrication of transparent dielectrics, which employs nondiffracting Bessel beams instead of the conventionally used Gaussian beams. The main advantage of Bessel beams is the possibility of recording linear photomodified tracks, extending along the lines of nondiffractive beam propagation without sample translation, as would be required for Gaussian beams. Recording of patterns with an aspect ratio of up to 10²-10³ in vitreous silica using amplified femtosecond Ti:saphire laser pulses is demonstrated.

Original language	English
Pages (from-to)	L1197-L1199
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	40
Issue number	11 A
DOIs	https://doi.org/10.1143/jjap.40.l1197
Publication status	Published - 2001 Nov 1
Externally published	Yes

Keywords

Bessel beam
Laser materials processing
Laser-induced breakdown
Ultrafast phenomena
Vitreous silica

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/jjap.40.l1197

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title = "Application of bessel beams for microfabrication of dielectrics by femtosecond laser",

abstract = "We demonstrate a novel approach to femtosecond microfabrication of transparent dielectrics, which employs nondiffracting Bessel beams instead of the conventionally used Gaussian beams. The main advantage of Bessel beams is the possibility of recording linear photomodified tracks, extending along the lines of nondiffractive beam propagation without sample translation, as would be required for Gaussian beams. Recording of patterns with an aspect ratio of up to 102-103 in vitreous silica using amplified femtosecond Ti:saphire laser pulses is demonstrated.",

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author = "Andrius Marcinkevicius and Saulius Juodkazis and Shigeki Matsuo and Vygantas Mizeikis and Hiroaki Misawa",

year = "2001",

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doi = "10.1143/jjap.40.l1197",

language = "English",

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TY - JOUR

T1 - Application of bessel beams for microfabrication of dielectrics by femtosecond laser

AU - Marcinkevicius, Andrius

AU - Juodkazis, Saulius

AU - Matsuo, Shigeki

AU - Mizeikis, Vygantas

AU - Misawa, Hiroaki

PY - 2001/11/1

Y1 - 2001/11/1

N2 - We demonstrate a novel approach to femtosecond microfabrication of transparent dielectrics, which employs nondiffracting Bessel beams instead of the conventionally used Gaussian beams. The main advantage of Bessel beams is the possibility of recording linear photomodified tracks, extending along the lines of nondiffractive beam propagation without sample translation, as would be required for Gaussian beams. Recording of patterns with an aspect ratio of up to 102-103 in vitreous silica using amplified femtosecond Ti:saphire laser pulses is demonstrated.

AB - We demonstrate a novel approach to femtosecond microfabrication of transparent dielectrics, which employs nondiffracting Bessel beams instead of the conventionally used Gaussian beams. The main advantage of Bessel beams is the possibility of recording linear photomodified tracks, extending along the lines of nondiffractive beam propagation without sample translation, as would be required for Gaussian beams. Recording of patterns with an aspect ratio of up to 102-103 in vitreous silica using amplified femtosecond Ti:saphire laser pulses is demonstrated.

KW - Bessel beam

KW - Laser materials processing

KW - Laser-induced breakdown

KW - Ultrafast phenomena

KW - Vitreous silica

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DO - 10.1143/jjap.40.l1197

M3 - Letter

AN - SCOPUS:0035517470

VL - 40

SP - L1197-L1199

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 11 A

ER -

Application of bessel beams for microfabrication of dielectrics by femtosecond laser

Abstract

Keywords

ASJC Scopus subject areas

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