Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing

X. Zhang, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Masayuki Shimojo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Scanning confocal electron microscopy (SCEM) is a novel technique for three-dimensional observation with a nanometer-scale resolution. Annular dark field (ADF) SCEM imaging has been demonstrated to have better depth resolution than bright field (BF) SCEM imaging. However, the depth resolution of ADF-SCEM images is limited by the vertical probe size determined by spherical aberration and convergence angle. Therefore, we attempted to employ a deconvolution image processing method to improve the depth resolution of SCEM images. The result of the deconvolution process for vertically sliced SCEM images showed the improvement in the depth resolution by 35-40%.

Original languageEnglish
Title of host publicationAdvanced Material Science and Technology
Pages259-262
Number of pages4
DOIs
Publication statusPublished - 2011 Mar 17
Externally publishedYes
Event7th International Forum on Advanced Material Science and Technology, IFAMST-7 - Dalian, China
Duration: 2010 Jun 262010 Jun 28

Publication series

NameMaterials Science Forum
Volume675 677
ISSN (Print)0255-5476

Conference

Conference7th International Forum on Advanced Material Science and Technology, IFAMST-7
CountryChina
CityDalian
Period10/6/2610/6/28

Keywords

  • Deconvolution
  • Image processing
  • Nanomaterials
  • Three-dimessional SCEM images

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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