Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

Shigeki Matsuo, Takashi Miyamoto, Takuro Tomita, Shuichi Hashimoto

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We report the simultaneous multipoint fabrication of polymer rods by the femtosecond laser processing of a negative photoresist using a microlens array (MLA). The rods were periodically arranged in the form of an array corresponding to the MLA and free-standing on a glass substrate. The use of a photomask enabled us to define the contour of the rod array. Furthermore, sample translation techniques were demonstrated for the effective fabrication of large-area structures.

Original languageEnglish
Pages (from-to)8264-8267
Number of pages4
JournalApplied Optics
Volume46
Issue number34
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes

Fingerprint

Photopolymers
Photomasks
photopolymers
photomasks
Microfabrication
rods
Fabrication
Lasers
Photoresists
Ultrashort pulses
lasers
Glass
fabrication
Polymers
Substrates
Processing
photoresists
glass
polymers

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array. / Matsuo, Shigeki; Miyamoto, Takashi; Tomita, Takuro; Hashimoto, Shuichi.

In: Applied Optics, Vol. 46, No. 34, 01.12.2007, p. 8264-8267.

Research output: Contribution to journalArticle

Matsuo, Shigeki ; Miyamoto, Takashi ; Tomita, Takuro ; Hashimoto, Shuichi. / Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array. In: Applied Optics. 2007 ; Vol. 46, No. 34. pp. 8264-8267.
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