Applications of microstructures fabricated by proton beam writing to electric-micro filters

Yusuke Furuta, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Fabrication of high-aspect-ratio microstructures was performed by proton beam writing (PBW) using a microbeam line at Takasaki Ion Accelerators for Advanced Radiation Application (TIARA), JAEA Takasaki, JAPAN. As one of the applications of the high-aspect-ratio structures micro-machined by PBW, we utilized the high-aspect pillars for electric-micro filters of microbes such as Escherichia coli and Yeast based on the dielectrophoretic force. The filter is equipped with high-aspect pillars with a height of ∼20 μm and a diameter of ∼1 μm on a glass plate. Evaluation of the dielectrophoresis (DEP) device for capturing E. coli and Yeast was made using either observation by optical microscope or photoluminescence (PL) measurements.

Original languageEnglish
Pages (from-to)2285-2288
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume267
Issue number12-13
DOIs
Publication statusPublished - 2009 Jun 15

Fingerprint

Proton beams
yeast
high aspect ratio
proton beams
Yeast
Escherichia coli
Aspect ratio
filters
ion accelerators
microstructure
Microstructure
microbeams
microorganisms
Escherichia
Electrophoresis
optical microscopes
Particle accelerators
Photoluminescence
Microscopes
photoluminescence

Keywords

  • Electric-micro filter
  • High-aspect-ratio microstructure
  • Proton beam writing
  • SU-8

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

Cite this

Applications of microstructures fabricated by proton beam writing to electric-micro filters. / Furuta, Yusuke; Nishikawa, Hiroyuki; Satoh, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Nakao, Ryota; Uchida, Satoshi.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 267, No. 12-13, 15.06.2009, p. 2285-2288.

Research output: Contribution to journalArticle

Furuta, Yusuke ; Nishikawa, Hiroyuki ; Satoh, Takahiro ; Ishii, Yasuyuki ; Kamiya, Tomihiro ; Nakao, Ryota ; Uchida, Satoshi. / Applications of microstructures fabricated by proton beam writing to electric-micro filters. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2009 ; Vol. 267, No. 12-13. pp. 2285-2288.
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