Applications of microstructures fabricated by proton beam writing to electric-micro filters

Yusuke Furuta, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science