Approach for estimating material properties of thin film on substrate by inverse analysis with surface wave spectroscopy

Ikuo Ihara, Kiyofumi Tokura, Tatsuhiko Aizawa, Hideo Koguchi, Junji Kihara

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The characterization of thin film on a substrate is very important for basic research and development of thin-film-coated materials. In this study, an inverse analysis with an ultrasonic spectroscopic technique is presented for quantitatively estimating elastic properties and density of the thin film on a substrate. The inverse problem is reduced to the optimum problem of minimizing the differences between dispersion curves obtained experimentally and numerically, where the dispersion curve is determined by analyzing the ultrasonic reflectivity measured or calculated from the elastic properties and density of the thin film. First, the stability and accuracy of the solution in the inverse problem are discussed. Secondly, numerical simulation using the optimization procedure with the complex method is carried out for a few sample problems, and the validity of the present procedure is examined. Furthermore, the experiment was demonstrated for TiN-coated tool steel.

Original languageEnglish
Pages (from-to)2664-2671
Number of pages8
JournalNippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A
Volume60
Issue number579
Publication statusPublished - 1994 Nov
Externally publishedYes

Fingerprint

Surface waves
Materials properties
Spectroscopy
Thin films
Substrates
Inverse problems
Ultrasonics
Coated materials
Tool steel
Computer simulation
Experiments

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Approach for estimating material properties of thin film on substrate by inverse analysis with surface wave spectroscopy. / Ihara, Ikuo; Tokura, Kiyofumi; Aizawa, Tatsuhiko; Koguchi, Hideo; Kihara, Junji.

In: Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, Vol. 60, No. 579, 11.1994, p. 2664-2671.

Research output: Contribution to journalArticle

@article{a35815412fe94b079df72711d5a51151,
title = "Approach for estimating material properties of thin film on substrate by inverse analysis with surface wave spectroscopy",
abstract = "The characterization of thin film on a substrate is very important for basic research and development of thin-film-coated materials. In this study, an inverse analysis with an ultrasonic spectroscopic technique is presented for quantitatively estimating elastic properties and density of the thin film on a substrate. The inverse problem is reduced to the optimum problem of minimizing the differences between dispersion curves obtained experimentally and numerically, where the dispersion curve is determined by analyzing the ultrasonic reflectivity measured or calculated from the elastic properties and density of the thin film. First, the stability and accuracy of the solution in the inverse problem are discussed. Secondly, numerical simulation using the optimization procedure with the complex method is carried out for a few sample problems, and the validity of the present procedure is examined. Furthermore, the experiment was demonstrated for TiN-coated tool steel.",
author = "Ikuo Ihara and Kiyofumi Tokura and Tatsuhiko Aizawa and Hideo Koguchi and Junji Kihara",
year = "1994",
month = "11",
language = "English",
volume = "60",
pages = "2664--2671",
journal = "Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A",
issn = "0387-5008",
publisher = "Japan Society of Mechanical Engineers",
number = "579",

}

TY - JOUR

T1 - Approach for estimating material properties of thin film on substrate by inverse analysis with surface wave spectroscopy

AU - Ihara, Ikuo

AU - Tokura, Kiyofumi

AU - Aizawa, Tatsuhiko

AU - Koguchi, Hideo

AU - Kihara, Junji

PY - 1994/11

Y1 - 1994/11

N2 - The characterization of thin film on a substrate is very important for basic research and development of thin-film-coated materials. In this study, an inverse analysis with an ultrasonic spectroscopic technique is presented for quantitatively estimating elastic properties and density of the thin film on a substrate. The inverse problem is reduced to the optimum problem of minimizing the differences between dispersion curves obtained experimentally and numerically, where the dispersion curve is determined by analyzing the ultrasonic reflectivity measured or calculated from the elastic properties and density of the thin film. First, the stability and accuracy of the solution in the inverse problem are discussed. Secondly, numerical simulation using the optimization procedure with the complex method is carried out for a few sample problems, and the validity of the present procedure is examined. Furthermore, the experiment was demonstrated for TiN-coated tool steel.

AB - The characterization of thin film on a substrate is very important for basic research and development of thin-film-coated materials. In this study, an inverse analysis with an ultrasonic spectroscopic technique is presented for quantitatively estimating elastic properties and density of the thin film on a substrate. The inverse problem is reduced to the optimum problem of minimizing the differences between dispersion curves obtained experimentally and numerically, where the dispersion curve is determined by analyzing the ultrasonic reflectivity measured or calculated from the elastic properties and density of the thin film. First, the stability and accuracy of the solution in the inverse problem are discussed. Secondly, numerical simulation using the optimization procedure with the complex method is carried out for a few sample problems, and the validity of the present procedure is examined. Furthermore, the experiment was demonstrated for TiN-coated tool steel.

UR - http://www.scopus.com/inward/record.url?scp=0028550962&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028550962&partnerID=8YFLogxK

M3 - Article

VL - 60

SP - 2664

EP - 2671

JO - Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A

JF - Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A

SN - 0387-5008

IS - 579

ER -