Assembling gold nanoparticles by dielectrophoresis with pit arrays on PMMA fabricated by proton beam writing

Taichi Shibuya, Satoshi Uchida, Yasuyuki Ishii, Hiroyuki Nishikawa

Research output: Contribution to journalArticle


We performed dielectrophoresis (DEP) of Au colloidal particles using PMMA pit arrays fabricated by proton beam writing. Frequency dependence of DEP shows the collection of nanoparticles at pit arrays is most efficient at the AC voltage frequency of 1 kHz. The application of DC voltage during DEP also helps transport and supply of nanoparticles to the pit arrays. Gradual increase of the AC voltage amplitude should be taken into consideration to avoid damage effects on indium tin oxide electrode by joule heating.

Original languageEnglish
Pages (from-to)60-63
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - 2019 Oct 1



  • Dielectrophoresis
  • Indium tin oxide
  • Nanoparticles
  • Proton beam writing

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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