Band gap enhancement and electrical properties of La2O3 films doped with Y2O3 as high-k gate insulators

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalApplied Physics Letters
Volume94
Publication statusPublished - 2009 Apr 1

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