Barrier Reliability Evaluation of Electroless Diffusion Barriers and Organosilane Monolayer by Bias Temperature Stress (BTS) Tests

A. Mitsumori, S. Fujishima, K. Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)88-89
JournalExtended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session
Publication statusPublished - 2012 Sep 14

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