Behavior of Reaction Products during Puddle Development in Fabrication of Ultra-large Scale Integrations

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)H764-H768
JournalJournal of the Electrochemical Society
Volume154
Publication statusPublished - 2007 Sep 1

Cite this

@article{058ddbb776b44af6bfa6e07930f85a94,
title = "Behavior of Reaction Products during Puddle Development in Fabrication of Ultra-large Scale Integrations",
author = "H. Eto and Homma, {H. Eto;Y.Ito;T.}",
year = "2007",
month = "9",
day = "1",
language = "English",
volume = "154",
pages = "H764--H768",
journal = "Journal of the Electrochemical Society",
issn = "0013-4651",
publisher = "Electrochemical Society, Inc.",

}

TY - JOUR

T1 - Behavior of Reaction Products during Puddle Development in Fabrication of Ultra-large Scale Integrations

AU - Eto, H.

AU - Homma, H. Eto;Y.Ito;T.

PY - 2007/9/1

Y1 - 2007/9/1

M3 - Article

VL - 154

SP - H764-H768

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

SN - 0013-4651

ER -