Behavior of Reaction Products during Puddle Development in Fabrication of Ultra-large Scale Integrations

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	H764-H768
Journal	Journal of the Electrochemical Society
Volume	154
Publication status	Published - 2007 Sept 1

Cite this

@article{058ddbb776b44af6bfa6e07930f85a94,

title = "Behavior of Reaction Products during Puddle Development in Fabrication of Ultra-large Scale Integrations",

author = "H. Eto and Homma, {H. Eto;Y.Ito;T.}",

year = "2007",

month = sep,

day = "1",

language = "English",

volume = "154",

pages = "H764--H768",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

}