Biochemical IC Family for General Micro Chemical Systems - Development of multiple concentrator, reactor and valve chips -

K.Ikuta K.Ikuta, S.Maruo S.Maruo, T.Fujisawa T.Fujisawa, T.Hasegawa T.Hasegawa, Tadahiro Hasegawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1046-1049
JournalThe 10th International Conference on Solid-State Sensors and Actuators
Publication statusPublished - 1999 Jun 1

Cite this

Biochemical IC Family for General Micro Chemical Systems - Development of multiple concentrator, reactor and valve chips -. / K.Ikuta, K.Ikuta; S.Maruo, S.Maruo; T.Fujisawa, T.Fujisawa; T.Hasegawa, T.Hasegawa; Hasegawa, Tadahiro.

In: The 10th International Conference on Solid-State Sensors and Actuators, 01.06.1999, p. 1046-1049.

Research output: Contribution to journalArticle

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AU - S.Maruo, S.Maruo

AU - T.Fujisawa, T.Fujisawa

AU - T.Hasegawa, T.Hasegawa

AU - Hasegawa, Tadahiro

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JO - The 10th International Conference on Solid-State Sensors and Actuators

JF - The 10th International Conference on Solid-State Sensors and Actuators

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