Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy

K. Mitsuishi; K. Iakoubovskii; M. Takeguchi; M. Shimojo; A. Hashimoto; K. Furuya

doi:10.1016/j.ultramic.2008.04.005

Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy

K. Mitsuishi, K. Iakoubovskii, M. Takeguchi, M. Shimojo, A. Hashimoto, K. Furuya

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.

Original language	English
Pages (from-to)	981-988
Number of pages	8
Journal	Ultramicroscopy
Volume	108
Issue number	9
DOIs	https://doi.org/10.1016/j.ultramic.2008.04.005
Publication status	Published - 2008 Aug 1
Externally published	Yes

Keywords

3D STEM
Bloch wave method
Confocal STEM
Confocal electron microscopy
Image simulation
Optical sectioning
SCEM

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

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10.1016/j.ultramic.2008.04.005

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title = "Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy",

abstract = "An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.",

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AU - Mitsuishi, K.

AU - Iakoubovskii, K.

AU - Takeguchi, M.

AU - Shimojo, M.

AU - Hashimoto, A.

AU - Furuya, K.

PY - 2008/8/1

Y1 - 2008/8/1

N2 - An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.

AB - An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.

KW - 3D STEM

KW - Bloch wave method

KW - Confocal STEM

KW - Confocal electron microscopy

KW - Image simulation

KW - Optical sectioning

KW - SCEM

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Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy

Abstract

Keywords

ASJC Scopus subject areas

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