Abstract
An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.
| Original language | English |
|---|---|
| Pages (from-to) | 981-988 |
| Number of pages | 8 |
| Journal | Ultramicroscopy |
| Volume | 108 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2008 Aug 1 |
Keywords
- 3D STEM
- Bloch wave method
- Confocal STEM
- Confocal electron microscopy
- Image simulation
- Optical sectioning
- SCEM
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Instrumentation
Fingerprint Dive into the research topics of 'Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy'. Together they form a unique fingerprint.
Cite this
Mitsuishi, K., Iakoubovskii, K., Takeguchi, M., Shimojo, M., Hashimoto, A., & Furuya, K. (2008). Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy. Ultramicroscopy, 108(9), 981-988. https://doi.org/10.1016/j.ultramic.2008.04.005