Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy

K. Mitsuishi, K. Iakoubovskii, M. Takeguchi, M. Shimojo, A. Hashimoto, K. Furuya

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.

Original languageEnglish
Pages (from-to)981-988
Number of pages8
JournalUltramicroscopy
Volume108
Issue number9
DOIs
Publication statusPublished - 2008 Aug 1

Keywords

  • 3D STEM
  • Bloch wave method
  • Confocal STEM
  • Confocal electron microscopy
  • Image simulation
  • Optical sectioning
  • SCEM

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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