Abstract
An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.
| Original language | English |
|---|---|
| Pages (from-to) | 981-988 |
| Number of pages | 8 |
| Journal | Ultramicroscopy |
| Volume | 108 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2008 Aug |
| Externally published | Yes |
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Keywords
- 3D STEM
- Bloch wave method
- Confocal electron microscopy
- Confocal STEM
- Image simulation
- Optical sectioning
- SCEM
ASJC Scopus subject areas
- Materials Science(all)
- Instrumentation
Cite this
Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy. / Mitsuishi, K.; Iakoubovskii, K.; Takeguchi, M.; Shimojo, Masayuki; Hashimoto, A.; Furuya, K.
In: Ultramicroscopy, Vol. 108, No. 9, 08.2008, p. 981-988.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy
AU - Mitsuishi, K.
AU - Iakoubovskii, K.
AU - Takeguchi, M.
AU - Shimojo, Masayuki
AU - Hashimoto, A.
AU - Furuya, K.
PY - 2008/8
Y1 - 2008/8
N2 - An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.
AB - An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.
KW - 3D STEM
KW - Bloch wave method
KW - Confocal electron microscopy
KW - Confocal STEM
KW - Image simulation
KW - Optical sectioning
KW - SCEM
UR - http://www.scopus.com/inward/record.url?scp=48149103390&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48149103390&partnerID=8YFLogxK
U2 - 10.1016/j.ultramic.2008.04.005
DO - 10.1016/j.ultramic.2008.04.005
M3 - Article
VL - 108
SP - 981
EP - 988
JO - Ultramicroscopy
JF - Ultramicroscopy
SN - 0304-3991
IS - 9
ER -