Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope

Peng Wang, Gavin Behan, Angus I. Kirkland, Peter D. Nellist, Eireann C. Cosgriff, Adrian J. D'Alfonso, Andrew J. Morgan, Leslie J. Allen, Ayako Hashimoto, Masaki Takeguchi, Kazutaka Mitsuishi, Masayuki Shimojo

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Scanning confocal electron microscopy (SCEM) offers a mechanism for three-dimensional imaging of materials, which makes use of the reduced depth of field in an aberration-corrected transmission electron microscope. The simplest configuration of SCEM is the bright-field mode. In this paper we present experimental data and simulations showing the form of bright-field SCEM images. We show that the depth dependence of the three-dimensional image can be explained in terms of two-dimensional images formed in the detector plane. For a crystalline sample, this so-called probe image is shown to be similar to a conventional diffraction pattern. Experimental results and simulations show how the diffracted probes in this image are elongated in thicker crystals and the use of this elongation to estimate sample thickness is explored.

Original languageEnglish
Pages (from-to)877-886
Number of pages10
JournalUltramicroscopy
Volume111
Issue number7
DOIs
Publication statusPublished - 2011 Jun
Externally publishedYes

Fingerprint

Confocal microscopy
Aberrations
Electron microscopy
aberration
Electron microscopes
electron microscopes
Scanning
scanning electron microscopy
Laser modes
Diffraction patterns
Elongation
probes
Crystalline materials
Detectors
Imaging techniques
Crystals
elongation
diffraction patterns
simulation
detectors

Keywords

  • Aberration-correction
  • Confocal
  • SCEM
  • Three dimensional

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electronic, Optical and Magnetic Materials

Cite this

Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope. / Wang, Peng; Behan, Gavin; Kirkland, Angus I.; Nellist, Peter D.; Cosgriff, Eireann C.; D'Alfonso, Adrian J.; Morgan, Andrew J.; Allen, Leslie J.; Hashimoto, Ayako; Takeguchi, Masaki; Mitsuishi, Kazutaka; Shimojo, Masayuki.

In: Ultramicroscopy, Vol. 111, No. 7, 06.2011, p. 877-886.

Research output: Contribution to journalArticle

Wang, P, Behan, G, Kirkland, AI, Nellist, PD, Cosgriff, EC, D'Alfonso, AJ, Morgan, AJ, Allen, LJ, Hashimoto, A, Takeguchi, M, Mitsuishi, K & Shimojo, M 2011, 'Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope', Ultramicroscopy, vol. 111, no. 7, pp. 877-886. https://doi.org/10.1016/j.ultramic.2010.10.012
Wang, Peng ; Behan, Gavin ; Kirkland, Angus I. ; Nellist, Peter D. ; Cosgriff, Eireann C. ; D'Alfonso, Adrian J. ; Morgan, Andrew J. ; Allen, Leslie J. ; Hashimoto, Ayako ; Takeguchi, Masaki ; Mitsuishi, Kazutaka ; Shimojo, Masayuki. / Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope. In: Ultramicroscopy. 2011 ; Vol. 111, No. 7. pp. 877-886.
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