Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope

Peng Wang, Gavin Behan, Angus I. Kirkland, Peter D. Nellist, Eireann C. Cosgriff, Adrian J. D'Alfonso, Andrew J. Morgan, Leslie J. Allen, Ayako Hashimoto, Masaki Takeguchi, Kazutaka Mitsuishi, Masayuki Shimojo

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Abstract

Scanning confocal electron microscopy (SCEM) offers a mechanism for three-dimensional imaging of materials, which makes use of the reduced depth of field in an aberration-corrected transmission electron microscope. The simplest configuration of SCEM is the bright-field mode. In this paper we present experimental data and simulations showing the form of bright-field SCEM images. We show that the depth dependence of the three-dimensional image can be explained in terms of two-dimensional images formed in the detector plane. For a crystalline sample, this so-called probe image is shown to be similar to a conventional diffraction pattern. Experimental results and simulations show how the diffracted probes in this image are elongated in thicker crystals and the use of this elongation to estimate sample thickness is explored.

Original languageEnglish
Pages (from-to)877-886
Number of pages10
JournalUltramicroscopy
Volume111
Issue number7
DOIs
Publication statusPublished - 2011 Jun 1

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Keywords

  • Aberration-correction
  • Confocal
  • SCEM
  • Three dimensional

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

Cite this

Wang, P., Behan, G., Kirkland, A. I., Nellist, P. D., Cosgriff, E. C., D'Alfonso, A. J., Morgan, A. J., Allen, L. J., Hashimoto, A., Takeguchi, M., Mitsuishi, K., & Shimojo, M. (2011). Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope. Ultramicroscopy, 111(7), 877-886. https://doi.org/10.1016/j.ultramic.2010.10.012