Challenges in the micromachining by proton beam writing and its applications

Research output: Contribution to journalReview article

Abstract

Proton beam writing (PBW) is a direct writing technique for the fabrication of micro- and submicron-scale structures with high-aspect ratio. The straight trajectory of MeV protons incident to target materials allows high-aspect-ratio micromachining with high throughput, when compared with a conventional direct writing process using low-energy electron beam. The principles and superior features of the PBW technique are illustrated by demonstrating the micromachining by PBW on various resists. Application of the high-aspect-pillar structures by PBW is also demonstrated for electro-micro filters using dielectrophoresis.

Original languageEnglish
Pages (from-to)461-466
Number of pages6
JournalIEEJ Transactions on Fundamentals and Materials
Volume128
Issue number7
DOIs
Publication statusPublished - 2008 Dec 1

Keywords

  • Dielectrophoresis
  • Direct write
  • Micromachining
  • Proton
  • Resist

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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