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Change of electrical properties of rutile- and anatase-TiO2 films by atomic layer deposited Al2O3
Toshihide Nabatame, Ippei Yamamoto, Tomomi Sawada, Akihiko Ohi, Thang Duy Dao, Tomoji Ohishi, Tadaaki Nagao
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution