Changes in effective work function of HfxRu1-x alloy gate electrode

T. Nabatame, Y. Nunoshige, M. Kadoshima, H. Takaba, K. Segawa, S. Kimura, H. Satake, H. Ota, Tomoji Ohishi, A. Toriumi

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Abstract

Effective work function (φ{symbol}m,eff) values of Hfx Ru1-x alloy gate electrodes on SiO2 metal-oxide-semiconductor (MOS) capacitors were carefully examined to assess whether the φ{symbol}m,eff was determined by the crystalline structure or the composition of the HfxRu1-x alloy. X-ray diffraction results indicated that the crystalline structures of HfxRu1-x alloy were divided into hexagonal-Ru, cubic-HfRu or hexagonal-Hf with the increase of Hf content. The φ{symbol}m,eff values could be controlled continuously from 4.6 to 4.0 eV by changing the Hf content. The experimental φ{symbol}m,eff value showed a good agreement with theoretical results considering the compositional ratio of pure Hf and Ru. These results suggest that the φ{symbol}m,eff of HfxRu1-x alloy gates on SiO2 MOS capacitors is dominantly determined by the HfxRu1-x composition rather than the crystalline structure.

Original languageEnglish
Pages (from-to)1524-1528
Number of pages5
JournalMicroelectronic Engineering
Volume85
Issue number7
DOIs
Publication statusPublished - 2008 Jul

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Keywords

  • Cubic-HfRu
  • Effective work function
  • Hexagonal-Hf
  • Hexagonal-Ru
  • HfRu alloy
  • MOS capacitor

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics

Cite this

Nabatame, T., Nunoshige, Y., Kadoshima, M., Takaba, H., Segawa, K., Kimura, S., Satake, H., Ota, H., Ohishi, T., & Toriumi, A. (2008). Changes in effective work function of HfxRu1-x alloy gate electrode. Microelectronic Engineering, 85(7), 1524-1528. https://doi.org/10.1016/j.mee.2008.02.008