Characteristics of Al 2 O 3 /native oxide/n-GaN capacitors by post-metallization annealing

Kazuya Yuge, Toshihide Nabatame, Yoshihiro Irokawa, Akihiko Ohi, Naoki Ikeda, Liwen Sang, Yasuo Koide, Tomoji Ohishi

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17 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy