Characteristics of BCl3 Plasma-Etched GaN Schottky Diodes

M. Nakaji, T. Egawa, H. Ishikawa, S. Arulkumaran, T. Jimbo

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)
Original languageEnglish
Pages (from-to)L493-495
JournalDefault journal
Volume41
Publication statusPublished - 2002 Apr 1

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