Characterization of chemically-deposited NiB and NiWB thin films as a capping layer for ULSI application

Tetsuya Osaka, Nao Takano, Tetsuya Kurokawa, Tomomi Kaneko, Kazuyoshi Ueno

Research output: Contribution to journalArticlepeer-review

52 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy