Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas

M. Takeguchi, Masayuki Shimojo, K. Mitsuishi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The arbitrary shape nanostructures composed of iron and iron carbide were fabricated using electron beam induced-chemical vapor deposition and their magnetic properties were characterized by electron holography in situ. A gas introduction system was installed in the FEG-SEM and the nozzle tip was about 1 mm away from the electron beam position. Fe(CO)5 gas was introduced into the specimen chamber and the partial pressure of the introduced gas was controlled to be about 7×10-5. Dark contrast lines in the phase image correspond to magnetic flux lines, which shows magnetic fields around the nanorings.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages62-63
Number of pages2
Publication statusPublished - 2004
Externally publishedYes
Event2004 International Microprocesses and Nanotechnology Conference - Osaka
Duration: 2004 Oct 262004 Oct 29

Other

Other2004 International Microprocesses and Nanotechnology Conference
CityOsaka
Period04/10/2604/10/29

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Chemical vapor deposition
Electron beams
Nanostructures
Iron
Gases
Nanorings
Electron holography
Magnetic flux
Partial pressure
Carbides
Nozzles
Magnetic properties
Magnetic fields
Scanning electron microscopy

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Takeguchi, M., Shimojo, M., Mitsuishi, K., Tanaka, M., & Furuya, K. (2004). Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 62-63)

Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas. / Takeguchi, M.; Shimojo, Masayuki; Mitsuishi, K.; Tanaka, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 62-63.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takeguchi, M, Shimojo, M, Mitsuishi, K, Tanaka, M & Furuya, K 2004, Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas. in Digest of Papers - Microprocesses and Nanotechnology 2004. pp. 62-63, 2004 International Microprocesses and Nanotechnology Conference, Osaka, 04/10/26.
Takeguchi M, Shimojo M, Mitsuishi K, Tanaka M, Furuya K. Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas. In Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 62-63
Takeguchi, M. ; Shimojo, Masayuki ; Mitsuishi, K. ; Tanaka, M. ; Furuya, K. / Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas. Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. pp. 62-63
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