Abstract
Titanium nitride, TiN is a typical ceramic coating film for cutting tools and dies; it often suffers from low oxidation temperature and high friction coefficient and wear volume. Its wearing and oxidation resistance is drastically improved by chemical modification via ion implantation. Carbon-, aluminum- and chlorine-ion implantation is introduced to describe the difference in the modified microstructure at the vicinity of surface. Ion-plated TiN films on a high-speed tool steel substrate are employed as a common specimen to be implanted. Each modified titanium nitride has its intrinsic, as-implanted nanostructure to the selected species. In the carbon implantation, the near-surface structure of TiN film is modified to have the layered bonding state with Ti-C/C-C/Ti-C. The Al-implantation modifies TiN to have non-equilibrium solid solution phase of (Ti, Al) N and metallic aluminum cluster. No change is seen in the chlorine implanted TiN except for increase of dislocations or point defects. The wear resistance is improved by the above as-implanted nano-structuring in the case of carbon implantation. Al- and Cl-implantation significantly improves the original oxidation and wearing resistance of TiN by the post-implantation nano-structuring. The stable, dense aluminum oxide layer is in-situ formed as a tight protective shield during the oxidation test by surface reaction between penetrating oxygen and diffusing aluminum. The lubricious titanium oxide film is also in-situ formed in the wear track at the presence of chlorine to sustain low friction and wear rate even in dry, severe wearing conditions.
| Original language | English |
|---|---|
| Pages (from-to) | 1962-1970 |
| Number of pages | 9 |
| Journal | Materials Transactions |
| Volume | 44 |
| Issue number | 10 |
| Publication status | Published - 2003 Oct |
| Externally published | Yes |
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Keywords
- Chemical modification
- Ion implantation
- Surface nano-structuring
- Titanium nitride film
- Wear and oxidation resistance
ASJC Scopus subject areas
- Materials Science(all)
- Metals and Alloys
Cite this
Chemical Modification of Titanium Nitride Films via Ion Implantation. / Aizawa, Tatsuhiko; Mitsuo, Atsushi; Akhadejdamrong, Thananan.
In: Materials Transactions, Vol. 44, No. 10, 10.2003, p. 1962-1970.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Chemical Modification of Titanium Nitride Films via Ion Implantation
AU - Aizawa, Tatsuhiko
AU - Mitsuo, Atsushi
AU - Akhadejdamrong, Thananan
PY - 2003/10
Y1 - 2003/10
N2 - Titanium nitride, TiN is a typical ceramic coating film for cutting tools and dies; it often suffers from low oxidation temperature and high friction coefficient and wear volume. Its wearing and oxidation resistance is drastically improved by chemical modification via ion implantation. Carbon-, aluminum- and chlorine-ion implantation is introduced to describe the difference in the modified microstructure at the vicinity of surface. Ion-plated TiN films on a high-speed tool steel substrate are employed as a common specimen to be implanted. Each modified titanium nitride has its intrinsic, as-implanted nanostructure to the selected species. In the carbon implantation, the near-surface structure of TiN film is modified to have the layered bonding state with Ti-C/C-C/Ti-C. The Al-implantation modifies TiN to have non-equilibrium solid solution phase of (Ti, Al) N and metallic aluminum cluster. No change is seen in the chlorine implanted TiN except for increase of dislocations or point defects. The wear resistance is improved by the above as-implanted nano-structuring in the case of carbon implantation. Al- and Cl-implantation significantly improves the original oxidation and wearing resistance of TiN by the post-implantation nano-structuring. The stable, dense aluminum oxide layer is in-situ formed as a tight protective shield during the oxidation test by surface reaction between penetrating oxygen and diffusing aluminum. The lubricious titanium oxide film is also in-situ formed in the wear track at the presence of chlorine to sustain low friction and wear rate even in dry, severe wearing conditions.
AB - Titanium nitride, TiN is a typical ceramic coating film for cutting tools and dies; it often suffers from low oxidation temperature and high friction coefficient and wear volume. Its wearing and oxidation resistance is drastically improved by chemical modification via ion implantation. Carbon-, aluminum- and chlorine-ion implantation is introduced to describe the difference in the modified microstructure at the vicinity of surface. Ion-plated TiN films on a high-speed tool steel substrate are employed as a common specimen to be implanted. Each modified titanium nitride has its intrinsic, as-implanted nanostructure to the selected species. In the carbon implantation, the near-surface structure of TiN film is modified to have the layered bonding state with Ti-C/C-C/Ti-C. The Al-implantation modifies TiN to have non-equilibrium solid solution phase of (Ti, Al) N and metallic aluminum cluster. No change is seen in the chlorine implanted TiN except for increase of dislocations or point defects. The wear resistance is improved by the above as-implanted nano-structuring in the case of carbon implantation. Al- and Cl-implantation significantly improves the original oxidation and wearing resistance of TiN by the post-implantation nano-structuring. The stable, dense aluminum oxide layer is in-situ formed as a tight protective shield during the oxidation test by surface reaction between penetrating oxygen and diffusing aluminum. The lubricious titanium oxide film is also in-situ formed in the wear track at the presence of chlorine to sustain low friction and wear rate even in dry, severe wearing conditions.
KW - Chemical modification
KW - Ion implantation
KW - Surface nano-structuring
KW - Titanium nitride film
KW - Wear and oxidation resistance
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M3 - Article
AN - SCOPUS:0344685537
VL - 44
SP - 1962
EP - 1970
JO - Materials Transactions
JF - Materials Transactions
SN - 1345-9678
IS - 10
ER -