Chemical modification of titanium nitride films via ion implantation.

T. Aizawa, A.Mitsuo A.Mitsuo, T. Akhadejdamrong

Research output: Contribution to journalArticle

LanguageEnglish
Pages1962-1970
JournalMaterials Transactions.
Volume44 [10] (2003)
StatePublished - 1800

Cite this

Aizawa, T., A.Mitsuo, A. M., & Akhadejdamrong, T. (1800). Chemical modification of titanium nitride films via ion implantation. Materials Transactions., 44 [10] (2003), 1962-1970.

Chemical modification of titanium nitride films via ion implantation. / Aizawa, T.; A.Mitsuo, A.Mitsuo; Akhadejdamrong, T.

In: Materials Transactions., Vol. 44 [10] (2003), 1800, p. 1962-1970.

Research output: Contribution to journalArticle

Aizawa, T, A.Mitsuo, AM & Akhadejdamrong, T 1800, 'Chemical modification of titanium nitride films via ion implantation.' Materials Transactions., vol. 44 [10] (2003), pp. 1962-1970.
Aizawa, T. ; A.Mitsuo, A.Mitsuo ; Akhadejdamrong, T./ Chemical modification of titanium nitride films via ion implantation.In: Materials Transactions.1800 ; Vol. 44 [10] (2003). pp. 1962-1970
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