Chemical modification of titanium nitride films via ion implantation.

T. Aizawa, A.Mitsuo A.Mitsuo, T. Akhadejdamrong

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1962-1970
JournalMaterials Transactions.
Volume44 [10] (2003)
Publication statusPublished - 1800

Cite this

Aizawa, T., A.Mitsuo, A. M., & Akhadejdamrong, T. (1800). Chemical modification of titanium nitride films via ion implantation. Materials Transactions., 44 [10] (2003), 1962-1970.