Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst

Toru Tanaka, Tomomi Sato, Yusuke Karasawa, Kazuyoshi Ueno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.

Original languageEnglish
Title of host publicationAdvanced Metallization Conference 2010
Pages258-259
Number of pages2
Publication statusPublished - 2010 Dec 1
EventAdvanced Metallization Conference 2010 - Albany, NY, United States
Duration: 2010 Oct 52010 Oct 7

Publication series

NameAdvanced Metallization Conference (AMC)
ISSN (Print)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2010
CountryUnited States
CityAlbany, NY
Period10/10/510/10/7

ASJC Scopus subject areas

  • Materials Science(all)
  • Industrial and Manufacturing Engineering

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    Tanaka, T., Sato, T., Karasawa, Y., & Ueno, K. (2010). Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. In Advanced Metallization Conference 2010 (pp. 258-259). (Advanced Metallization Conference (AMC)).