Abstract
CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.
| Original language | English |
|---|---|
| Title of host publication | Advanced Metallization Conference (AMC) |
| Pages | 258-259 |
| Number of pages | 2 |
| Publication status | Published - 2010 |
| Event | Advanced Metallization Conference 2010 - Albany, NY Duration: 2010 Oct 5 → 2010 Oct 7 |
Other
| Other | Advanced Metallization Conference 2010 |
|---|---|
| City | Albany, NY |
| Period | 10/10/5 → 10/10/7 |
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ASJC Scopus subject areas
- Materials Science(all)
- Industrial and Manufacturing Engineering
Cite this
Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. / Tanaka, Toru; Sato, Tomomi; Karasawa, Yusuke; Ueno, Kazuyoshi.
Advanced Metallization Conference (AMC). 2010. p. 258-259.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst
AU - Tanaka, Toru
AU - Sato, Tomomi
AU - Karasawa, Yusuke
AU - Ueno, Kazuyoshi
PY - 2010
Y1 - 2010
N2 - CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.
AB - CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.
UR - http://www.scopus.com/inward/record.url?scp=79957657821&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79957657821&partnerID=8YFLogxK
M3 - Conference contribution
SN - 9781617822810
SP - 258
EP - 259
BT - Advanced Metallization Conference (AMC)
ER -