Abstract
CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.
| Original language | English |
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| Title of host publication | Advanced Metallization Conference 2010 |
| Pages | 258-259 |
| Number of pages | 2 |
| Publication status | Published - 2010 Dec 1 |
| Event | Advanced Metallization Conference 2010 - Albany, NY, United States Duration: 2010 Oct 5 → 2010 Oct 7 |
Publication series
| Name | Advanced Metallization Conference (AMC) |
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| ISSN (Print) | 1540-1766 |
Conference
| Conference | Advanced Metallization Conference 2010 |
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| Country | United States |
| City | Albany, NY |
| Period | 10/10/5 → 10/10/7 |
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ASJC Scopus subject areas
- Materials Science(all)
- Industrial and Manufacturing Engineering
Cite this
Tanaka, T., Sato, T., Karasawa, Y., & Ueno, K. (2010). Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. In Advanced Metallization Conference 2010 (pp. 258-259). (Advanced Metallization Conference (AMC)).