Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst

Toru Tanaka; Tomomi Sato; Yusuke Karasawa; Kazuyoshi Ueno

Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst

Toru Tanaka, Tomomi Sato, Yusuke Karasawa, Kazuyoshi Ueno

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.

Original language	English
Title of host publication	Advanced Metallization Conference 2010
Pages	258-259
Number of pages	2
Publication status	Published - 2010
Event	Advanced Metallization Conference 2010 - Albany, NY, United States Duration: 2010 Oct 5 → 2010 Oct 7

Publication series

Name	Advanced Metallization Conference (AMC)
ISSN (Print)	1540-1766

Conference

Conference	Advanced Metallization Conference 2010
Country	United States
City	Albany, NY
Period	10/10/5 → 10/10/7

ASJC Scopus subject areas

Materials Science(all)
Industrial and Manufacturing Engineering

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Cite this

@inproceedings{b3a0fba8ed7a4fa19e2db1f4fb71dc99,

title = "Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst",

abstract = "CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.",

author = "Toru Tanaka and Tomomi Sato and Yusuke Karasawa and Kazuyoshi Ueno",

year = "2010",

language = "English",

isbn = "9781617822810",

series = "Advanced Metallization Conference (AMC)",

pages = "258--259",

booktitle = "Advanced Metallization Conference 2010",

note = "Advanced Metallization Conference 2010 ; Conference date: 05-10-2010 Through 07-10-2010",

}

TY - GEN

T1 - Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst

AU - Tanaka, Toru

AU - Sato, Tomomi

AU - Karasawa, Yusuke

AU - Ueno, Kazuyoshi

PY - 2010

Y1 - 2010

N2 - CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.

AB - CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.

UR - http://www.scopus.com/inward/record.url?scp=79957657821&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79957657821&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:79957657821

SN - 9781617822810

T3 - Advanced Metallization Conference (AMC)

SP - 258

EP - 259

BT - Advanced Metallization Conference 2010

T2 - Advanced Metallization Conference 2010

Y2 - 5 October 2010 through 7 October 2010

ER -