Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst

Toru Tanaka, Tomomi Sato, Yusuke Karasawa, Kazuyoshi Ueno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.

Original languageEnglish
Title of host publicationAdvanced Metallization Conference (AMC)
Pages258-259
Number of pages2
Publication statusPublished - 2010
EventAdvanced Metallization Conference 2010 - Albany, NY
Duration: 2010 Oct 52010 Oct 7

Other

OtherAdvanced Metallization Conference 2010
CityAlbany, NY
Period10/10/510/10/7

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Chemical vapor deposition
Catalysts
Deposits
Temperature

ASJC Scopus subject areas

  • Materials Science(all)
  • Industrial and Manufacturing Engineering

Cite this

Tanaka, T., Sato, T., Karasawa, Y., & Ueno, K. (2010). Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. In Advanced Metallization Conference (AMC) (pp. 258-259)

Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. / Tanaka, Toru; Sato, Tomomi; Karasawa, Yusuke; Ueno, Kazuyoshi.

Advanced Metallization Conference (AMC). 2010. p. 258-259.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tanaka, T, Sato, T, Karasawa, Y & Ueno, K 2010, Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. in Advanced Metallization Conference (AMC). pp. 258-259, Advanced Metallization Conference 2010, Albany, NY, 10/10/5.
Tanaka T, Sato T, Karasawa Y, Ueno K. Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. In Advanced Metallization Conference (AMC). 2010. p. 258-259
Tanaka, Toru ; Sato, Tomomi ; Karasawa, Yusuke ; Ueno, Kazuyoshi. / Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. Advanced Metallization Conference (AMC). 2010. pp. 258-259
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