TY - GEN
T1 - Coating with supersonic free-jet PVD
AU - Niwa, Naotake
AU - Yumoto, Atsushi
AU - Yamamoto, Takahisa
AU - Hiroki, Fujio
AU - Shiota, Ichiro
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJ-PVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.
AB - Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJ-PVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.
KW - Nanocoating
KW - Nanoparticles
KW - Physical vapor deposition
KW - Supersonic gas flow
UR - http://www.scopus.com/inward/record.url?scp=38349103435&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38349103435&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:38349103435
SN - 0878494626
SN - 9780878494620
T3 - Materials Science Forum
SP - 981
EP - 984
BT - Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
T2 - 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
Y2 - 5 November 2007 through 9 November 2007
ER -