Coating with supersonic free-jet PVD

Naotake Niwa; Atsushi Yumoto; Takahisa Yamamoto; Fujio Hiroki; Ichiro Shiota

Coating with supersonic free-jet PVD

Naotake Niwa, Atsushi Yumoto, Takahisa Yamamoto, Fujio Hiroki, Ichiro Shiota

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJ-PVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.

Original language	English
Title of host publication	Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
Pages	981-984
Number of pages	4
Edition	PART 2
Publication status	Published - 2007 Dec 1
Event	6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju, Korea, Republic of Duration: 2007 Nov 5 → 2007 Nov 9

Publication series

Name	Materials Science Forum
Number	PART 2
Volume	561-565
ISSN (Print)	0255-5476

Conference

Conference	6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
Country	Korea, Republic of
City	Jeju
Period	07/11/5 → 07/11/9

Keywords

Nanocoating
Nanoparticles
Physical vapor deposition
Supersonic gas flow

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Cite this

Niwa, N., Yumoto, A., Yamamoto, T., Hiroki, F., & Shiota, I. (2007). Coating with supersonic free-jet PVD. In Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 (PART 2 ed., pp. 981-984). (Materials Science Forum; Vol. 561-565, No. PART 2).

Coating with supersonic free-jet PVD. / Niwa, Naotake; Yumoto, Atsushi; Yamamoto, Takahisa; Hiroki, Fujio; Shiota, Ichiro.

Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6. PART 2. ed. 2007. p. 981-984 (Materials Science Forum; Vol. 561-565, No. PART 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Niwa, N, Yumoto, A, Yamamoto, T, Hiroki, F & Shiota, I 2007, Coating with supersonic free-jet PVD. in Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6. PART 2 edn, Materials Science Forum, no. PART 2, vol. 561-565, pp. 981-984, 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6, Jeju, Korea, Republic of, 07/11/5.

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