Abstract
Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJ-PVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.
| Original language | English |
|---|---|
| Title of host publication | Materials Science Forum |
| Pages | 981-984 |
| Number of pages | 4 |
| Volume | 561-565 |
| Edition | PART 2 |
| Publication status | Published - 2007 |
| Externally published | Yes |
| Event | 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju Duration: 2007 Nov 5 → 2007 Nov 9 |
Publication series
| Name | Materials Science Forum |
|---|---|
| Number | PART 2 |
| Volume | 561-565 |
| ISSN (Print) | 02555476 |
Other
| Other | 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 |
|---|---|
| City | Jeju |
| Period | 07/11/5 → 07/11/9 |
Fingerprint
Keywords
- Nanocoating
- Nanoparticles
- Physical vapor deposition
- Supersonic gas flow
ASJC Scopus subject areas
- Materials Science(all)
Cite this
Coating with supersonic free-jet PVD. / Niwa, Naotake; Yumoto, Atsushi; Yamamoto, Takahisa; Hiroki, Fujio; Shiota, Ichiro.
Materials Science Forum. Vol. 561-565 PART 2. ed. 2007. p. 981-984 (Materials Science Forum; Vol. 561-565, No. PART 2).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Coating with supersonic free-jet PVD
AU - Niwa, Naotake
AU - Yumoto, Atsushi
AU - Yamamoto, Takahisa
AU - Hiroki, Fujio
AU - Shiota, Ichiro
PY - 2007
Y1 - 2007
N2 - Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJ-PVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.
AB - Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJ-PVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.
KW - Nanocoating
KW - Nanoparticles
KW - Physical vapor deposition
KW - Supersonic gas flow
UR - http://www.scopus.com/inward/record.url?scp=38349103435&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38349103435&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:38349103435
SN - 0878494626
SN - 9780878494620
VL - 561-565
T3 - Materials Science Forum
SP - 981
EP - 984
BT - Materials Science Forum
ER -