Coating with supersonic free-jet PVD

Naotake Niwa, Atsushi Yumoto, Takahisa Yamamoto, Fujio Hiroki, Ichiro Shiota

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJ-PVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages981-984
Number of pages4
Volume561-565
EditionPART 2
Publication statusPublished - 2007
Externally publishedYes
Event6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju
Duration: 2007 Nov 52007 Nov 9

Publication series

NameMaterials Science Forum
NumberPART 2
Volume561-565
ISSN (Print)02555476

Other

Other6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
CityJeju
Period07/11/507/11/9

Fingerprint

Physical vapor deposition
Coatings
Flow of gases
Noble Gases
Inert gases
Nanoparticles
Evaporation
Gases
Vacuum deposition
Nozzles
Deposits
Pipe
Cracks
Substrates

Keywords

  • Nanocoating
  • Nanoparticles
  • Physical vapor deposition
  • Supersonic gas flow

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Niwa, N., Yumoto, A., Yamamoto, T., Hiroki, F., & Shiota, I. (2007). Coating with supersonic free-jet PVD. In Materials Science Forum (PART 2 ed., Vol. 561-565, pp. 981-984). (Materials Science Forum; Vol. 561-565, No. PART 2).

Coating with supersonic free-jet PVD. / Niwa, Naotake; Yumoto, Atsushi; Yamamoto, Takahisa; Hiroki, Fujio; Shiota, Ichiro.

Materials Science Forum. Vol. 561-565 PART 2. ed. 2007. p. 981-984 (Materials Science Forum; Vol. 561-565, No. PART 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Niwa, N, Yumoto, A, Yamamoto, T, Hiroki, F & Shiota, I 2007, Coating with supersonic free-jet PVD. in Materials Science Forum. PART 2 edn, vol. 561-565, Materials Science Forum, no. PART 2, vol. 561-565, pp. 981-984, 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6, Jeju, 07/11/5.
Niwa N, Yumoto A, Yamamoto T, Hiroki F, Shiota I. Coating with supersonic free-jet PVD. In Materials Science Forum. PART 2 ed. Vol. 561-565. 2007. p. 981-984. (Materials Science Forum; PART 2).
Niwa, Naotake ; Yumoto, Atsushi ; Yamamoto, Takahisa ; Hiroki, Fujio ; Shiota, Ichiro. / Coating with supersonic free-jet PVD. Materials Science Forum. Vol. 561-565 PART 2. ed. 2007. pp. 981-984 (Materials Science Forum; PART 2).
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