Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD

Shimada Shimada, S S, S. S., Takahashi Takahashi, M. M., Kiyono Kiyono, H. H., Tsujino Tsujino, J. J.

Research output: Contribution to journalArticle

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)6616-6621
JournalThin Solid Films
Volume516
Publication statusPublished - 2008 Jan 1

Cite this

Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD. / Shimada, Shimada; S, S; S., S.; Takahashi, Takahashi; M., M.; Kiyono, Kiyono; H., H.; Tsujino, Tsujino; J., J.

In: Thin Solid Films, Vol. 516, 01.01.2008, p. 6616-6621.

Research output: Contribution to journalArticle

Shimada, Shimada ; S, S ; S., S. ; Takahashi, Takahashi ; M., M. ; Kiyono, Kiyono ; H., H. ; Tsujino, Tsujino ; J., J. / Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD. In: Thin Solid Films. 2008 ; Vol. 516. pp. 6616-6621.
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AU - Takahashi, Takahashi

AU - M., M.

AU - Kiyono, Kiyono

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