Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition

S. Yoshida; T. Kobayashi; M. Kumano; M. Esashi

doi:10.1109/TRANSDUCERS.2011.5969537

Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition

S. Yoshida, T. Kobayashi, M. Kumano, M. Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This study reports on the investigation of the conformability and photo and electron beam (EB) patternability of a poly-glycidyl methacrylate (PGMA) film formed by initiated chemical vapor deposition (i-CVD). It is demonstrated that the PGMA film can be conformally deposited on a Si trench structure via i-CVD. In addition, the pattern definition of the film is also successfully demonstrated by deep ultraviolet and EB lithography. These achievements indicate that i-CVD has the potential to become a powerful method to achieve the conformal coating of a lithographic resist.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	994-997
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969537
Publication status	Published - 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 2011 Jun 5 → 2011 Jun 9

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	11/6/5 → 11/6/9

Keywords

Conformal coating
Initiated chemical vapor deposition
Poly-glycidyl methacrylate
Resist coating technology

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2011.5969537

Cite this

Yoshida, S., Kobayashi, T., Kumano, M., & Esashi, M. (2011). Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 994-997). [5969537] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969537

Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition. / Yoshida, S.; Kobayashi, T.; Kumano, M. et al.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 994-997 5969537 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yoshida, S, Kobayashi, T, Kumano, M & Esashi, M 2011, Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969537, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 994-997, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 11/6/5. https://doi.org/10.1109/TRANSDUCERS.2011.5969537

Yoshida S, Kobayashi T, Kumano M, Esashi M. Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 994-997. 5969537. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969537

Yoshida, S. ; Kobayashi, T. ; Kumano, M. et al. / Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 994-997 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

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Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition

Abstract

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Keywords

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