Construction of superconducting bulk magnet magnetron sputtering apparatus for fabrication of highly reflective optical mirrors

Uichiro Mizutani, Takashi Yamaguchi, Hiroshi Ikuta, Tetsuya Tomofuji, Yosuke Yanagi, Yoshitaka Itoh, Tetsuo Oka

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Engineering & Materials Science

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