Abstract
GaInAsP surfaces were investigated by contact angle measurement of a water droplet to estimate their hydrophilicity. The most hydrophilic surface of GaInAsP was obtained by the O2 plasma activation process. Wafer direct bonding was successfully achieved between O2 plasma activated GaInAsP and garnet crystals.
| Original language | English |
|---|---|
| Title of host publication | CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 1206-1207 |
| Number of pages | 2 |
| ISBN (Electronic) | 0780356616, 9780780356610 |
| DOIs | |
| Publication status | Published - 1999 Jan 1 |
| Event | 1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999 - Seoul, Korea, Republic of Duration: 1999 Aug 30 → 1999 Sep 3 |
Publication series
| Name | CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics |
|---|---|
| Volume | 4 |
Conference
| Conference | 1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999 |
|---|---|
| Country | Korea, Republic of |
| City | Seoul |
| Period | 99/8/30 → 99/9/3 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Computer Networks and Communications
- Physics and Astronomy(all)
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Cite this
Yokoi, H., Mizumoto, T., Shimizu, M., Waniishi, T., Futakuchi, N., Kaida, N., & Nakano, Y. (1999). Contact angle measurement of GaInAsP surfaces for wafer direct bonding with garnet crystals. In CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics (pp. 1206-1207). [814737] (CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics; Vol. 4). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.1999.814737