Contact angle measurement of wafer surfaces for integrating laser diode and optical isolator by wafer bonding

Hideki Yokoi, Tetsuya Mizumoto, Masafumi Shimizu, Takashi Waniishi, Naoki Futakuchi, Noriaki Kaida, Yoshiaki Nakano

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	The Electrochemical Society
Publication status	Published - 1999 Oct 19

Cite this

@article{f067b07c591047548d0e2f434918a246,

title = "Contact angle measurement of wafer surfaces for integrating laser diode and optical isolator by wafer bonding",

author = "Hideki Yokoi and Tetsuya Mizumoto and Masafumi Shimizu and Takashi Waniishi and Naoki Futakuchi and Noriaki Kaida and Yoshiaki Nakano",

year = "1999",

month = oct,

day = "19",

language = "English",

journal = "The Electrochemical Society",

}

TY - JOUR

T1 - Contact angle measurement of wafer surfaces for integrating laser diode and optical isolator by wafer bonding

AU - Yokoi, Hideki

AU - Mizumoto, Tetsuya

AU - Shimizu, Masafumi

AU - Waniishi, Takashi

AU - Futakuchi, Naoki

AU - Kaida, Noriaki

AU - Nakano, Yoshiaki

PY - 1999/10/19

Y1 - 1999/10/19

M3 - Article

JO - The Electrochemical Society

JF - The Electrochemical Society

ER -