Continuous CZ Technology for Silicon Single Crystals

Michio Kida, Yoshiaki Arai, Naoki Ono, Kensho Sahira

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)343-343
JournalThe Electrochemical Society
Publication statusPublished - 1989 Mar 30

Cite this

Continuous CZ Technology for Silicon Single Crystals. / Kida, Michio; Arai, Yoshiaki; Ono, Naoki; Sahira, Kensho.

In: The Electrochemical Society, 30.03.1989, p. 343-343.

Research output: Contribution to journalArticle

Kida, Michio ; Arai, Yoshiaki ; Ono, Naoki ; Sahira, Kensho. / Continuous CZ Technology for Silicon Single Crystals. In: The Electrochemical Society. 1989 ; pp. 343-343.
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