Control of refractive index of fluorinated polyimide by proton beam irradiation

Yukitaka Arai, Yoshimichi Ohki, Keisuke Saito, Hiroyuki Nishikawa

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

To clarify the feasibility of controlling the refractive index of a polymer by proton beam irradiation, we irradiated 1.0 MeV protons to a fluorinated polyimide film. Before and after the proton irradiation at a fluence between 1 × 1014 and 7 × 1016 cm-2, the film surface was scanned by a profilometer. It was found that the depth of a dent, which increases with fluence, was induced by the irradiation. The refractive index of the ionirradiated region was calculated using the Lorentz-Lorenz equation, substituting the depth of the dent and the projected range of the protons. When the fluorinated polyimide was irradiated at a fluence of 7 × 1016 cm-2, the refractive index increased by about 3.3%, which agrees with the increment in refractive index measured by spectroscopic ellipsometry. The increment in refractive index (0.21%) induced by the irradiation of protons at the fluence of 1 × 1015 cm -2 is comparable to the value (0.35%) observed when protons were irradiated to SiO2 glass at a similar fluence. Therefore, it is reasonable to assume that the ion irradiation to a polymer can be a good method for fabricating a high-performance polymer-based optical waveguide.

Original languageEnglish
Article number012601
JournalJapanese Journal of Applied Physics
Volume52
Issue number1
DOIs
Publication statusPublished - 2013 Jan

Fingerprint

Proton beams
proton beams
polyimides
Polyimides
Refractive index
fluence
Irradiation
refractivity
Protons
irradiation
protons
polymers
Polymers
Proton irradiation
profilometers
proton irradiation
Spectroscopic ellipsometry
Optical waveguides
Ion bombardment
ion irradiation

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Control of refractive index of fluorinated polyimide by proton beam irradiation. / Arai, Yukitaka; Ohki, Yoshimichi; Saito, Keisuke; Nishikawa, Hiroyuki.

In: Japanese Journal of Applied Physics, Vol. 52, No. 1, 012601, 01.2013.

Research output: Contribution to journalArticle

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