Crystallinity of ZnO Films Prepared byRF Plasma CVD

K.Suzuki K.Suzuki, Y.Ishizaki Y.Ishizaki, N.Saito N.Saito, O.Takai O.Takai, Takahiro Ishizaki

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2008

Cite this

K.Suzuki, K. S., Y.Ishizaki, Y. I., N.Saito, N. S., O.Takai, O. T., & Ishizaki, T. (2008). Crystallinity of ZnO Films Prepared byRF Plasma CVD. Default journal.