Au layer thickness dependence (9-34 nm) of Ge crystallization in the metal-induced layer exchange process has been investigated. It has been found that Ge crystals are (111) oriented when the Au layer is as thin as 9 nm, whereas crystal grains are randomly oriented when the Au layer is as thick as 34 nm. The difference is discussed in terms of the difference in the position of nucleation sites of Ge crystals.
- Au-induced layer exchange
- Low-temperature crystallization
- Metal-induced crystallization (MIC)
ASJC Scopus subject areas
- Physics and Astronomy(all)