| Original language | English |
|---|---|
| Pages (from-to) | 489-494 |
| Journal | Advanced Metallization and Interconnect Systems for ULSI Applications in 1997 |
| Publication status | Published - 1997 Oct 1 |
Cite this
K.Ueno, K. U., Y.Tsuchiya, Y. T., N.Itoh, N. I., T.Kikkawa, T. K., A.Sekiguchi, A. S., & Ueno, K. (1997). Crystallographic orientation change with line-width for CVD Cu damascene interconnection. Advanced Metallization and Interconnect Systems for ULSI Applications in 1997, 489-494.
Crystallographic orientation change with line-width for CVD Cu damascene interconnection. / K.Ueno, K.Ueno; Y.Tsuchiya, Y.Tsuchiya; N.Itoh, N.Itoh; T.Kikkawa, T.Kikkawa; A.Sekiguchi, A.Sekiguchi; Ueno, Kazuyoshi.
In: Advanced Metallization and Interconnect Systems for ULSI Applications in 1997, 01.10.1997, p. 489-494.Research output: Contribution to journal › Article
K.Ueno, KU, Y.Tsuchiya, YT, N.Itoh, NI, T.Kikkawa, TK, A.Sekiguchi, AS & Ueno, K 1997, 'Crystallographic orientation change with line-width for CVD Cu damascene interconnection', Advanced Metallization and Interconnect Systems for ULSI Applications in 1997, pp. 489-494.
K.Ueno KU, Y.Tsuchiya YT, N.Itoh NI, T.Kikkawa TK, A.Sekiguchi AS, Ueno K. Crystallographic orientation change with line-width for CVD Cu damascene interconnection. Advanced Metallization and Interconnect Systems for ULSI Applications in 1997. 1997 Oct 1;489-494.
@article{e41b86255e284a9aaa965304ea0ad2ea,
title = "Crystallographic orientation change with line-width for CVD Cu damascene interconnection",
author = "K.Ueno K.Ueno and Y.Tsuchiya Y.Tsuchiya and N.Itoh N.Itoh and T.Kikkawa T.Kikkawa and A.Sekiguchi A.Sekiguchi and Kazuyoshi Ueno",
year = "1997",
month = "10",
day = "1",
language = "English",
pages = "489--494",
journal = "Advanced Metallization and Interconnect Systems for ULSI Applications in 1997",
}
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T1 - Crystallographic orientation change with line-width for CVD Cu damascene interconnection
AU - K.Ueno, K.Ueno
AU - Y.Tsuchiya, Y.Tsuchiya
AU - N.Itoh, N.Itoh
AU - T.Kikkawa, T.Kikkawa
AU - A.Sekiguchi, A.Sekiguchi
AU - Ueno, Kazuyoshi
PY - 1997/10/1
Y1 - 1997/10/1
M3 - Article
SP - 489
EP - 494
JO - Advanced Metallization and Interconnect Systems for ULSI Applications in 1997
JF - Advanced Metallization and Interconnect Systems for ULSI Applications in 1997
ER -