Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers

Tuan Anh Phan, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

We report on the development of MEMS current sensors composed of Fe67.5B22.5Nd6.3Nb3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free-standing cantilever structures that benefit from the superior mechanical properties of the metallic glass, such as high fracture toughness and high yield strength. The resonant frequency of the proposed FBNN cantilever was 3.85 kHz in the fundamental flexure mode when the length, width and thickness of the cantilever were 750 μm, 150 μm and 3 μm, respectively. A feed wire with a diameter of 500 μm was placed close to the FBNN cantilever, and a downshift in the resonance peak was observed when the current intensity through the feed wire increased. The sensitivity of this frequency shift to the current intensity was 5.0 √Hz/A when the distance between the cantilever and the wire was 500 μm.

Original languageEnglish
Pages (from-to)28-31
Number of pages4
JournalMicroelectronic Engineering
Volume135
DOIs
Publication statusPublished - 2015 Mar 5
Externally publishedYes

Keywords

  • Current sensor
  • Metallic glass
  • Micro-cantilever
  • Resonant sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers'. Together they form a unique fingerprint.

  • Cite this