Current status of copper multilevel interconnects (Invited)

K.Ueno K.Ueno, M.Iguchi M.Iguchi, T.Yokoyama T.Yokoyama, N.Oda N.Oda, H.Miyamoto H.Miyamoto, Y.Matsubara Y.Matsubara, T.Horiuchi T.Horiuchi, S.Saito S.Saito, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1-8
JournalProceedings of 1st International Conference on Semiconductor Technology
Volume2
Publication statusPublished - 2001 Mar 1

Cite this

K.Ueno, K. U., M.Iguchi, M. I., T.Yokoyama, T. Y., N.Oda, N. O., H.Miyamoto, H. M., Y.Matsubara, Y. M., ... Ueno, K. (2001). Current status of copper multilevel interconnects (Invited). Proceedings of 1st International Conference on Semiconductor Technology, 2, 1-8.