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Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film
Takuro Tomita, Shigeki Matsuo, Tatsuya Okada, Tsunenobu Kimoto, Hiroyuki Matsunami, Takeshi Mitani, Shin Ichi Nakashima
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)