Defects and morphologies produced by keV ion bombardment of Ge and Si surfaces

D.G.Cahill D.G.Cahill, J.Kim J.Kim, K.Kyuno K.Kyuno, R.S.Averback R.S.Averback, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalMaterials Research Society
Publication statusPublished - 1999 Apr 1

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D.G.Cahill, D. G. C., J.Kim, J. K., K.Kyuno, K. K., R.S.Averback, R. S. A., & Kyuno, K. (1999). Defects and morphologies produced by keV ion bombardment of Ge and Si surfaces. Materials Research Society.