Abstract
Composite TiBC-SiC film coatings with various contents of SiC were deposited on Si wafer at 800°C from a mixed solution of titanium tetra-ethoxide, boron tri-ethoxide and/or hexa-methyl-disiloxane by an Ar/H 2 thermal plasma CVD. The crystalline phases (TiB 2, TiC, SiC) in the coatings are identified by thin film grazing incidence X-ray diffraction. The surfaces and cross-sections of the monolithic TiBC and SiC and composite TiBC-SiC coatings are observed by scanning electron microscopy. The microstructure of a cross-section of composite TiBC-55 mol% SiC film is observed by transmission electron microscopy with EDX analysis. The wear rates of the composite TiBC-SiC film are evaluated from cross-sectional profiles of the residual wear tracks formed by ball-on-disk wear tests using SUS and alumina balls with their results correlated with the SiC content and film hardness.
| Original language | English |
|---|---|
| Pages (from-to) | 415-420 |
| Number of pages | 6 |
| Journal | Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan |
| Volume | 117 |
| Issue number | 1364 |
| Publication status | Published - 2009 Apr |
| Externally published | Yes |
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Keywords
- Composite
- CVD
- Thermal plasma
- TiBC-SiC
- Wear resistance
ASJC Scopus subject areas
- Ceramics and Composites
- Materials Chemistry
- Chemistry(all)
- Condensed Matter Physics
Cite this
Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD. / Shimada, Shiro; Fuji, Yusuke; Kiyono, Hajime; Tsujino, Jiro; Yamazaki, Isao.
In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, Vol. 117, No. 1364, 04.2009, p. 415-420.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD
AU - Shimada, Shiro
AU - Fuji, Yusuke
AU - Kiyono, Hajime
AU - Tsujino, Jiro
AU - Yamazaki, Isao
PY - 2009/4
Y1 - 2009/4
N2 - Composite TiBC-SiC film coatings with various contents of SiC were deposited on Si wafer at 800°C from a mixed solution of titanium tetra-ethoxide, boron tri-ethoxide and/or hexa-methyl-disiloxane by an Ar/H 2 thermal plasma CVD. The crystalline phases (TiB 2, TiC, SiC) in the coatings are identified by thin film grazing incidence X-ray diffraction. The surfaces and cross-sections of the monolithic TiBC and SiC and composite TiBC-SiC coatings are observed by scanning electron microscopy. The microstructure of a cross-section of composite TiBC-55 mol% SiC film is observed by transmission electron microscopy with EDX analysis. The wear rates of the composite TiBC-SiC film are evaluated from cross-sectional profiles of the residual wear tracks formed by ball-on-disk wear tests using SUS and alumina balls with their results correlated with the SiC content and film hardness.
AB - Composite TiBC-SiC film coatings with various contents of SiC were deposited on Si wafer at 800°C from a mixed solution of titanium tetra-ethoxide, boron tri-ethoxide and/or hexa-methyl-disiloxane by an Ar/H 2 thermal plasma CVD. The crystalline phases (TiB 2, TiC, SiC) in the coatings are identified by thin film grazing incidence X-ray diffraction. The surfaces and cross-sections of the monolithic TiBC and SiC and composite TiBC-SiC coatings are observed by scanning electron microscopy. The microstructure of a cross-section of composite TiBC-55 mol% SiC film is observed by transmission electron microscopy with EDX analysis. The wear rates of the composite TiBC-SiC film are evaluated from cross-sectional profiles of the residual wear tracks formed by ball-on-disk wear tests using SUS and alumina balls with their results correlated with the SiC content and film hardness.
KW - Composite
KW - CVD
KW - Thermal plasma
KW - TiBC-SiC
KW - Wear resistance
UR - http://www.scopus.com/inward/record.url?scp=65449160150&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=65449160150&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:65449160150
VL - 117
SP - 415
EP - 420
JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
SN - 0914-5400
IS - 1364
ER -