Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD

Shiro Shimada, Yusuke Fuji, Hajime Kiyono, Jiro Tsujino, Isao Yamazaki

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Composite TiBC-SiC film coatings with various contents of SiC were deposited on Si wafer at 800°C from a mixed solution of titanium tetra-ethoxide, boron tri-ethoxide and/or hexa-methyl-disiloxane by an Ar/H 2 thermal plasma CVD. The crystalline phases (TiB 2, TiC, SiC) in the coatings are identified by thin film grazing incidence X-ray diffraction. The surfaces and cross-sections of the monolithic TiBC and SiC and composite TiBC-SiC coatings are observed by scanning electron microscopy. The microstructure of a cross-section of composite TiBC-55 mol% SiC film is observed by transmission electron microscopy with EDX analysis. The wear rates of the composite TiBC-SiC film are evaluated from cross-sectional profiles of the residual wear tracks formed by ball-on-disk wear tests using SUS and alumina balls with their results correlated with the SiC content and film hardness.

Original languageEnglish
Pages (from-to)415-420
Number of pages6
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume117
Issue number1364
Publication statusPublished - 2009 Apr
Externally publishedYes

Fingerprint

Plasma Gases
Plasma CVD
thermal plasmas
wear resistance
Wear resistance
vapor deposition
wafers
coatings
Coatings
composite materials
Composite materials
Wear of materials
balls
Boron
wear tests
Aluminum Oxide
cross sections
Titanium
grazing incidence
Energy dispersive spectroscopy

Keywords

  • Composite
  • CVD
  • Thermal plasma
  • TiBC-SiC
  • Wear resistance

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry
  • Chemistry(all)
  • Condensed Matter Physics

Cite this

Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD. / Shimada, Shiro; Fuji, Yusuke; Kiyono, Hajime; Tsujino, Jiro; Yamazaki, Isao.

In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, Vol. 117, No. 1364, 04.2009, p. 415-420.

Research output: Contribution to journalArticle

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