Design and spectroscopic reflectometry characterization of pulsed laser deposition combinatorial libraries

Peter K. Schenck, Nabil D. Bassim, Makoto Otani, Hiroyuki Oguchi, Martin L. Green

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

The goal of the design of pulsed laser deposition (PLD) combinatorial library films is to optimize the compositional coverage of the films while maintaining a uniform thickness. The deposition pattern of excimer laser PLD films can be modeled with a bimodal cos n distribution. Deposited films were characterized using a spectroscopic reflectometer (250-1000 nm) to map the thickness of both single composition calibration films and combinatorial library films. These distribution functions were used to simulate the composition and thickness of multiple target combinatorial library films. The simulations were correlated with electron-probe microanalysis wavelength-dispersive spectroscopy (EPMA-WDS) composition maps. The composition and thickness of the library films can be fine-tuned by adjusting the laser spot size, fluence, background gas pressure, target geometry and other processing parameters which affect the deposition pattern. Results from compositionally graded combinatorial library films of the ternary system Al 2 O 3 -HfO 2 -Y 2 O 3 are discussed.

Original languageEnglish
Pages (from-to)781-784
Number of pages4
JournalApplied Surface Science
Volume254
Issue number3
DOIs
Publication statusPublished - 2007 Nov 30
Externally publishedYes

Keywords

  • Combinatorial
  • Reflectometry
  • Thin films

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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