Design and spectroscopic reflectometry characterization of pulsed laser deposition combinatorial libraries

Peter K. Schenck; Nabil D. Bassim; Makoto Otani; Hiroyuki Oguchi; Martin L. Green

doi:10.1016/j.apsusc.2007.05.086

Design and spectroscopic reflectometry characterization of pulsed laser deposition combinatorial libraries

Peter K. Schenck, Nabil D. Bassim, Makoto Otani, Hiroyuki Oguchi, Martin L. Green

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

The goal of the design of pulsed laser deposition (PLD) combinatorial library films is to optimize the compositional coverage of the films while maintaining a uniform thickness. The deposition pattern of excimer laser PLD films can be modeled with a bimodal cos ⁿ distribution. Deposited films were characterized using a spectroscopic reflectometer (250-1000 nm) to map the thickness of both single composition calibration films and combinatorial library films. These distribution functions were used to simulate the composition and thickness of multiple target combinatorial library films. The simulations were correlated with electron-probe microanalysis wavelength-dispersive spectroscopy (EPMA-WDS) composition maps. The composition and thickness of the library films can be fine-tuned by adjusting the laser spot size, fluence, background gas pressure, target geometry and other processing parameters which affect the deposition pattern. Results from compositionally graded combinatorial library films of the ternary system Al ₂ O ₃ -HfO ₂ -Y ₂ O ₃ are discussed.

Original language	English
Pages (from-to)	781-784
Number of pages	4
Journal	Applied Surface Science
Volume	254
Issue number	3
DOIs	https://doi.org/10.1016/j.apsusc.2007.05.086
Publication status	Published - 2007 Nov 30
Externally published	Yes

Keywords

Combinatorial
Reflectometry
Thin films

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2007.05.086

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title = "Design and spectroscopic reflectometry characterization of pulsed laser deposition combinatorial libraries",

abstract = " The goal of the design of pulsed laser deposition (PLD) combinatorial library films is to optimize the compositional coverage of the films while maintaining a uniform thickness. The deposition pattern of excimer laser PLD films can be modeled with a bimodal cos n distribution. Deposited films were characterized using a spectroscopic reflectometer (250-1000 nm) to map the thickness of both single composition calibration films and combinatorial library films. These distribution functions were used to simulate the composition and thickness of multiple target combinatorial library films. The simulations were correlated with electron-probe microanalysis wavelength-dispersive spectroscopy (EPMA-WDS) composition maps. The composition and thickness of the library films can be fine-tuned by adjusting the laser spot size, fluence, background gas pressure, target geometry and other processing parameters which affect the deposition pattern. Results from compositionally graded combinatorial library films of the ternary system Al 2 O 3 -HfO 2 -Y 2 O 3 are discussed.",

keywords = "Combinatorial, Reflectometry, Thin films",

author = "Schenck, {Peter K.} and Bassim, {Nabil D.} and Makoto Otani and Hiroyuki Oguchi and Green, {Martin L.}",

year = "2007",

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doi = "10.1016/j.apsusc.2007.05.086",

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T1 - Design and spectroscopic reflectometry characterization of pulsed laser deposition combinatorial libraries

AU - Schenck, Peter K.

AU - Bassim, Nabil D.

AU - Otani, Makoto

AU - Oguchi, Hiroyuki

AU - Green, Martin L.

PY - 2007/11/30

Y1 - 2007/11/30

N2 - The goal of the design of pulsed laser deposition (PLD) combinatorial library films is to optimize the compositional coverage of the films while maintaining a uniform thickness. The deposition pattern of excimer laser PLD films can be modeled with a bimodal cos n distribution. Deposited films were characterized using a spectroscopic reflectometer (250-1000 nm) to map the thickness of both single composition calibration films and combinatorial library films. These distribution functions were used to simulate the composition and thickness of multiple target combinatorial library films. The simulations were correlated with electron-probe microanalysis wavelength-dispersive spectroscopy (EPMA-WDS) composition maps. The composition and thickness of the library films can be fine-tuned by adjusting the laser spot size, fluence, background gas pressure, target geometry and other processing parameters which affect the deposition pattern. Results from compositionally graded combinatorial library films of the ternary system Al 2 O 3 -HfO 2 -Y 2 O 3 are discussed.

AB - The goal of the design of pulsed laser deposition (PLD) combinatorial library films is to optimize the compositional coverage of the films while maintaining a uniform thickness. The deposition pattern of excimer laser PLD films can be modeled with a bimodal cos n distribution. Deposited films were characterized using a spectroscopic reflectometer (250-1000 nm) to map the thickness of both single composition calibration films and combinatorial library films. These distribution functions were used to simulate the composition and thickness of multiple target combinatorial library films. The simulations were correlated with electron-probe microanalysis wavelength-dispersive spectroscopy (EPMA-WDS) composition maps. The composition and thickness of the library films can be fine-tuned by adjusting the laser spot size, fluence, background gas pressure, target geometry and other processing parameters which affect the deposition pattern. Results from compositionally graded combinatorial library films of the ternary system Al 2 O 3 -HfO 2 -Y 2 O 3 are discussed.

KW - Combinatorial

KW - Reflectometry

KW - Thin films

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JO - Applied Surface Science

JF - Applied Surface Science

IS - 3

ER -

Design and spectroscopic reflectometry characterization of pulsed laser deposition combinatorial libraries

Abstract

Keywords

ASJC Scopus subject areas

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