Design of Implementable Adaptive Control for Micro/Nano Positioning System Driven by Piezoelectric Actuator

Xinkai Chen, Chun Yi Su, Zhi Li, Fan Yang

Research output: Contribution to journalArticle

  • 16 Citations

Abstract

The micro/nano positioning system discussed in this paper includes a piezoelectric actuator (PEA) and flexure-hinge-based positioning mechanism. Due to the existence of the hysteretic nonlinearity in the PEA and the friction in the system, the accurate positioning of the piezo-actuated positioning system calls applicable control schemes for practical applications. To this end, an implementable adaptive controller is developed in the paper, where a minimized parameterization hysteresis model is employed to reduce the computational load. The formulated adaptive control law guarantees the global stability of the controlled positioning system, and the positioning error can approach to zero asymptotically. The advantages of the proposed method making on-line implementation feasible are that the traditional inversion of the hysteresis does not need to be constructed directly; the real values of the parameters of the positioning system neither need to be identified nor measured; only the parameters in the formulation of the controller are estimated online. Comparison with the feedforward plus proportional-integral feedback control scheme is conducted and experimental results show the effectiveness of the proposed method.

LanguageEnglish
Article number7479557
Pages6471-6481
Number of pages11
JournalIEEE Transactions on Industrial Electronics
Volume63
Issue number10
DOIs
StatePublished - 2016 Oct 1

Fingerprint

Piezoelectric actuators
Hysteresis
Controllers
Hinges
Parameterization
Feedback control
Friction

Keywords

  • Adaptive control
  • hysteresis
  • micro/nano positioning system
  • piezoelectric actuator

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Design of Implementable Adaptive Control for Micro/Nano Positioning System Driven by Piezoelectric Actuator. / Chen, Xinkai; Su, Chun Yi; Li, Zhi; Yang, Fan.

In: IEEE Transactions on Industrial Electronics, Vol. 63, No. 10, 7479557, 01.10.2016, p. 6471-6481.

Research output: Contribution to journalArticle

@article{746343d9792048aa9d37e559624c581d,
title = "Design of Implementable Adaptive Control for Micro/Nano Positioning System Driven by Piezoelectric Actuator",
abstract = "The micro/nano positioning system discussed in this paper includes a piezoelectric actuator (PEA) and flexure-hinge-based positioning mechanism. Due to the existence of the hysteretic nonlinearity in the PEA and the friction in the system, the accurate positioning of the piezo-actuated positioning system calls applicable control schemes for practical applications. To this end, an implementable adaptive controller is developed in the paper, where a minimized parameterization hysteresis model is employed to reduce the computational load. The formulated adaptive control law guarantees the global stability of the controlled positioning system, and the positioning error can approach to zero asymptotically. The advantages of the proposed method making on-line implementation feasible are that the traditional inversion of the hysteresis does not need to be constructed directly; the real values of the parameters of the positioning system neither need to be identified nor measured; only the parameters in the formulation of the controller are estimated online. Comparison with the feedforward plus proportional-integral feedback control scheme is conducted and experimental results show the effectiveness of the proposed method.",
keywords = "Adaptive control, hysteresis, micro/nano positioning system, piezoelectric actuator",
author = "Xinkai Chen and Su, {Chun Yi} and Zhi Li and Fan Yang",
year = "2016",
month = "10",
day = "1",
doi = "10.1109/TIE.2016.2573270",
language = "English",
volume = "63",
pages = "6471--6481",
journal = "IEEE Transactions on Industrial Electronics",
issn = "0278-0046",
publisher = "IEEE Industrial Electronics Society",
number = "10",

}

TY - JOUR

T1 - Design of Implementable Adaptive Control for Micro/Nano Positioning System Driven by Piezoelectric Actuator

AU - Chen,Xinkai

AU - Su,Chun Yi

AU - Li,Zhi

AU - Yang,Fan

PY - 2016/10/1

Y1 - 2016/10/1

N2 - The micro/nano positioning system discussed in this paper includes a piezoelectric actuator (PEA) and flexure-hinge-based positioning mechanism. Due to the existence of the hysteretic nonlinearity in the PEA and the friction in the system, the accurate positioning of the piezo-actuated positioning system calls applicable control schemes for practical applications. To this end, an implementable adaptive controller is developed in the paper, where a minimized parameterization hysteresis model is employed to reduce the computational load. The formulated adaptive control law guarantees the global stability of the controlled positioning system, and the positioning error can approach to zero asymptotically. The advantages of the proposed method making on-line implementation feasible are that the traditional inversion of the hysteresis does not need to be constructed directly; the real values of the parameters of the positioning system neither need to be identified nor measured; only the parameters in the formulation of the controller are estimated online. Comparison with the feedforward plus proportional-integral feedback control scheme is conducted and experimental results show the effectiveness of the proposed method.

AB - The micro/nano positioning system discussed in this paper includes a piezoelectric actuator (PEA) and flexure-hinge-based positioning mechanism. Due to the existence of the hysteretic nonlinearity in the PEA and the friction in the system, the accurate positioning of the piezo-actuated positioning system calls applicable control schemes for practical applications. To this end, an implementable adaptive controller is developed in the paper, where a minimized parameterization hysteresis model is employed to reduce the computational load. The formulated adaptive control law guarantees the global stability of the controlled positioning system, and the positioning error can approach to zero asymptotically. The advantages of the proposed method making on-line implementation feasible are that the traditional inversion of the hysteresis does not need to be constructed directly; the real values of the parameters of the positioning system neither need to be identified nor measured; only the parameters in the formulation of the controller are estimated online. Comparison with the feedforward plus proportional-integral feedback control scheme is conducted and experimental results show the effectiveness of the proposed method.

KW - Adaptive control

KW - hysteresis

KW - micro/nano positioning system

KW - piezoelectric actuator

UR - http://www.scopus.com/inward/record.url?scp=84988025866&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84988025866&partnerID=8YFLogxK

U2 - 10.1109/TIE.2016.2573270

DO - 10.1109/TIE.2016.2573270

M3 - Article

VL - 63

SP - 6471

EP - 6481

JO - IEEE Transactions on Industrial Electronics

T2 - IEEE Transactions on Industrial Electronics

JF - IEEE Transactions on Industrial Electronics

SN - 0278-0046

IS - 10

M1 - 7479557

ER -