Develoment of nano-columnar carbon coating for dry micro-stamping

Tatsuhiko Aizawa, Eiji Iwamura, Kuniyoshi Itoh

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1177-1181
JournalSurface & Coating Technology
Volume202
Publication statusPublished - 2007 Apr 25

Cite this

Aizawa, T., Iwamura, E., & Itoh, K. (2007). Develoment of nano-columnar carbon coating for dry micro-stamping. Surface & Coating Technology, 202, 1177-1181.